Substrate processing apparatus

ABSTRACT

A substrate processing apparatus capable of preventing deflection of exhaust flow which may occur when an asymmetric exhaust structure is introduced includes: an exhaust unit providing an exhaust space surrounding a reaction space; an exhaust port connected to the exhaust unit; and a flow control unit disposed in the exhaust space, wherein the exhaust port is arranged asymmetrically with respect to the reaction space, and the flow control unit may include: an upper flow control plate including a plurality of first through holes; and a lower flow control plate disposed below the upper flow control plate and including a plurality of second through holes.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application No. 62/940,812, filed on Nov. 26, 2019 in the United States Patent and Trademark Office, the disclosure of which is incorporated herein in its entirety by reference.

BACKGROUND 1. Field

One or more embodiments relate to a substrate processing apparatus, and more particularly, to a substrate processing apparatus having an improved exhaust structure.

2. Description of Related Art

In the recent semiconductor substrate processing apparatus, a substrate processing apparatus equipped with a plurality of individual reactors is widely used to improve productivity per hour. Unlike conventional batch furnaces, such a device has the advantage of being able to simultaneously increase productivity with precise control of individual substrates. Korean Patent No. 0782529 discloses a substrate processing apparatus of this kind.

In the substrate processing apparatus equipped with a plurality of individual reactors, a gas supply and exhaust system of each reactor is important for achieving reproducibility of the process and continuity with subsequent processes. For example, when the thickness and uniformity of a thin film deposited on a substrate are not constant depending on the position on the substrate and when the deviation is severe, it may cause a decrease in reproducibility between the reactors and an increase in defect rate in subsequent processes.

Meanwhile, in the case of the substrate processing apparatus having a plurality of individual reactors, each reactor is equipped with a gas supply device such as a showerhead. Therefore, it is possible to evenly distribute gas supplied into the reactor. However, in general, since such a substrate processing apparatus applies an asymmetric exhaust system, deflection of an exhaust flow is caused, which results in deflection of the final thickness and uniformity of the thin film on the substrate without uniform distribution.

SUMMARY

One or more embodiments include a substrate processing apparatus capable of preventing deflection of exhaust flow which may occur when an asymmetric exhaust structure is introduced.

Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments of the disclosure.

According to one or more embodiments, a substrate processing apparatus includes: an exhaust unit providing an exhaust space surrounding a reaction space; an exhaust port connected to the exhaust unit; and a flow control unit disposed in the exhaust space, wherein the exhaust port is arranged asymmetrically with respect to the reaction space, and the flow control unit may include: an upper flow control plate including a plurality of first through holes; and a lower flow control plate disposed below the upper flow control plate and including a plurality of second through holes.

According to an example of the substrate processing apparatus, the plurality of first through holes may be arranged along a first circumference having a first diameter, and the plurality of second through holes may be arranged along a second circumference having a second diameter greater than the first diameter.

According to another example of the substrate processing apparatus, an exhaust flow from the exhaust space towards the reaction space may be generated between the upper flow control plate and the lower flow control plate.

According to another example of the substrate processing apparatus, the exhaust flow may include: a first exhaust flow to move away from the exhaust port in a first region of the exhaust space adjacent to the exhaust port; and a second exhaust flow directed towards the exhaust port in a second region of the exhaust space apart from the exhaust port.

According to another example of the substrate processing apparatus, diameters of the plurality of first through holes may be greater than diameters of the plurality of second through holes.

According to another example of the substrate processing apparatus, densities of the plurality of first through holes may be less than densities of the plurality of second through holes.

According to another example of the substrate processing apparatus, the plurality of first through holes may be disposed to alternate with the plurality of second through holes.

According to another example of the substrate processing apparatus, the upper flow control plate may include a first region adjacent the exhaust port and a second region apart from the exhaust port, through holes of the first region among the plurality of first through holes may be arranged along a third circumference having a third diameter, and through holes of the second region among the plurality of first through holes may be arranged along a fourth circumference having a fourth diameter greater than the third diameter.

According to another example of the substrate processing apparatus, the exhaust unit may further include: a partition wall defining a side portion of the reaction space; an outer wall parallel to the partition wall; and a connecting wall extending to connect the partition wall to the outer wall.

According to another example of the substrate processing apparatus, at least one of the upper flow control plate and the lower flow control plate may be arranged to contact the partition wall and the outer wall.

According to another example of the substrate processing apparatus, the substrate processing apparatus may further include a support configured to support the exhaust unit, and the reaction space and the exhaust space may communicate with each other through a gap between the partition wall and the support.

According to another example of the substrate processing apparatus, the lower flow control plate may include: a first portion extending between the partition wall and the outer wall; and a second portion extending from the first portion and contacting the support portion, wherein the plurality of second through holes may be arranged to penetrate the first portion.

According to another example of the substrate processing apparatus, the outer wall may include an opening connecting the exhaust unit and the exhaust port, and the opening may be above the gap.

According to another example of the substrate processing apparatus, the upper flow control plate and the lower flow control plate may be disposed between the opening and the gap.

According to another example of the substrate processing apparatus, gas in the reaction space is exhausted to the exhaust port along a path in the exhaust space, and the path may include: a first path extending from the gap towards the outer wall; a second path extending from the first path to penetrate the lower flow control plate; a third path extending from the second path towards the partition wall; and a fourth path extending from the third path to penetrate the upper flow control plate.

According to another example of the substrate processing apparatus, the flow control unit is configured to generate exhaust of first exhaust efficiency in an exhaust space adjacent to the exhaust port, and to generate exhaust of second exhaust efficiency higher than the first exhaust efficiency in an exhaust space apart from the exhaust port.

According to one or more embodiments, a substrate processing apparatus includes: an exhaust unit providing an exhaust space surrounding a reaction space; an exhaust port connected to the exhaust unit; and a flow control unit disposed in the exhaust space, wherein the exhaust port is disposed asymmetrically with respect to the reaction space, and the flow control unit may be configured to generate exhaust of first exhaust efficiency in an exhaust space adjacent to the exhaust port, and to generate exhaust of second exhaust efficiency higher than the first exhaust efficiency in an exhaust space apart from the exhaust port.

According to an example of the substrate processing apparatus, the flow control unit may include a flow control plate including a plurality of through holes arranged to surround the reaction space.

According to one or more embodiments, a substrate processing apparatus includes: an exhaust unit providing an exhaust space surrounding a reaction space; an exhaust port connected to the exhaust unit; and a flow control unit disposed in the exhaust space, wherein the exhaust port is disposed asymmetrically with respect to the reaction space, and the flow control unit may be configured to generate a first exhaust flow to move away from the exhaust port in a first region of the exhaust space adjacent to the exhaust port, and to generate a second exhaust flow directed towards the exhaust port in a second region of the exhaust space apart from the exhaust port.

According to an example of the substrate processing apparatus, exhaust in the exhaust space adjacent to the exhaust port may have first exhaust efficiency by the first exhaust to move away from the exhaust port, and exhaust in the exhaust space apart from the exhaust port may have second exhaust efficiency higher than the first exhaust efficiency by the second exhaust flow directed towards the exhaust port.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other aspects, features, and advantages of certain embodiment s of the disclosure will be more apparent from the following description taken in conjunct ion with the accompanying drawings, in which:

FIGS. 1 and 2 schematically show a substrate processing apparatus according to embodiments of the inventive concept, wherein FIG. 1 illustrates a portion of the substrate processing apparatus, and FIG. 2 illustrates another portion of the substrate processing apparatus.

FIGS. 3 to 5 are views of a substrate processing apparatus according to some embodiments of the inventive concept;

FIGS. 6 to 8 are views of a substrate processing apparatus according to embodiments of the inventive concept;

FIG. 9 is a view of a substrate processing apparatus according to some embodiments of the inventive concept;

FIGS. 10 and 11 are views of comparative examples of an exhaust flow in a related substrate processing apparatus and an exhaust flow in a substrate processing apparatus according to the disclosure;

FIG. 12 is a view of an embodiment of an upper flow control plate and a lower flow control plate;

FIGS. 13A, 13B, and 13C are views of various embodiments of the arrangement of exhaust holes on upper and lower flow control plates in a direction facing an exhaust port in a reaction space;

FIG. 14 is a view of a substrate processing apparatus according to some embodiments of the inventive concept; and

FIG. 15 is a view of a flow control plate configured to have a “T” shape in cross-section.

DETAILED DESCRIPTION

Reference will now be made in detail to embodiments, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. In this regard, the present embodiments may have different forms and should not be construed as being limited to the descriptions set forth herein. Accordingly, the embodiments are merely described below, by referring to the figures, to explain aspects of the present description. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items. Expressions such as “at least one of,” when preceding a list of elements, modify the entire list of elements and do not modify the individual elements of the list.

The terminology used herein is for the purpose of describing particular embodiments and is not intended to limit the disclosure. As used herein, the singular forms “a”, “an”, and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “includes”, “comprises” and/or “including”, “comprising” used herein specify the presence of stated features, integers, steps, processes, members, components, and/or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, processes, members, components, and/or groups thereof. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.

It will be understood that, although the terms first, second, etc. may be used herein to describe various members, components, regions, layers, and/or sections, these members, components, regions, layers, and/or sections should not be limited by these terms. These terms do not denote any order, quantity, or importance, but rather are only used to distinguish one component, region, layer, and/or section from another component, region, layer, and/or section. Thus, a first member, component, region, layer, or section discussed below could be termed a second member, component, region, layer, or section without departing from the teachings of embodiments.

Embodiments of the disclosure will be described hereinafter with reference to the drawings in which embodiments of the disclosure are schematically illustrated. In the drawings, variations from the illustrated shapes may be expected as a result of, for example, manufacturing techniques and/or tolerances. Thus, the embodiments of the disclosure should not be construed as being limited to the particular shapes of regions illustrated herein but may include deviations in shapes that result, for example, from manufacturing processes.

FIGS. 1 and 2 are views of a substrate processing apparatus according to embodiments of the inventive concept. FIG. 1 shows a substrate processing apparatus and a portion (cross-section of a portion where an opening of an exhaust unit 120 is not formed) of the substrate processing apparatus. FIG. 2 shows a substrate processing apparatus and another portion (cross-section of a portion where an opening OP of the exhaust unit 120 is formed) of the substrate processing apparatus.

Referring to FIGS. 1 and 2, the substrate processing apparatus may include a partition 100, a substrate supporting unit 150, a processing unit 110, an exhaust unit 120, and a flow control unit 130. The substrate processing apparatus may include a reaction space 51 and an exhaust space 55 connected to the reaction space 51.

The partition 100 is a chamber for receiving the substrate supporting unit 150, which may also be referred to as a chamber. In an embodiment, a reactor including the reaction space 51 is referred to as an inner chamber, and the entire structure of the substrate processing apparatus surrounding a plurality of reactors (e.g., four reactors) may be referred to as an outer chamber. An exhaust line 18 may be provided in the partition 100. In some embodiments, the exhaust line 18 may be formed to extend along the inside of a side wall of the partition 100. In an embodiment, the substrate processing apparatus includes a first surface and a second surface adjacent the first surface, and the exhaust line 18 may extend along a corner between the first surface and the second surface. In additional embodiments, the exhaust line 18 may be formed to extend along the inside of a lower wall of the partition 100.

The processing unit 110 may be located on the substrate supporting unit 150 configured to support a substrate. The reaction space may be defined between the substrate supporting unit 150 and the processing unit 110. The processing unit 110 may serve as a first lid that defines an upper surface of the reaction space 51. In other words, the first lid on the substrate supporting unit 150 may include at least one processing unit 110.

The processing unit 110 may include members that perform appropriate functions depending on a function of the substrate processing apparatus. For example, when a substrate processing apparatus performs a deposition function, the processing unit 110 may include a reactant supplier (e.g., a showerhead assembly). In another embodiment, when the reactor performs a polishing function, the processing unit 110 may include a polishing pad.

The processing unit 110 may be a conductor and may be used as an electrode for generating plasma. That is, the processing unit 110 may serve as one electrode for generating plasma. The processing unit 110 in this manner (the manner in which the processing unit 110 itself is used as an electrode) is hereinafter referred to as a gas supply electrode.

The substrate supporting unit 150 may be configured to provide an area where an object to be processed (not shown) such as a semiconductor or a display substrate is seated. The substrate supporting unit 150 may be supported by a support (not shown) capable of vertical and rotational movement. Further, the substrate supporting unit 150 may be a conductor and may be used as an electrode for generating plasma (i.e., an opposite electrode of a gas supply electrode).

The exhaust unit 120 may be located between the processing unit 110 and a support TLD. The exhaust unit 120 may extend to surround the reaction space 51. Gas in the reaction space 51 may be exhausted to an exhaust port 13 through the exhaust unit 120. However, as will be described later below, since the exhaust port 13 is disposed asymmetrically with respect to the reaction space 51, deflection of an exhaust flow may occur. In order to prevent such deflection of the exhaust flow, the flow control unit 130 may be mounted in an exhaust space. The flow control unit 130 may be configured to generate exhaust of first exhaust efficiency in an exhaust space (see FIG. 2) adjacent to the exhaust port 13, and to generate exhaust of second exhaust efficiency higher than the first exhaust efficiency in an exhaust space (see FIG. 1) apart from the exhaust port 13.

In an embodiment, the exhaust unit 120 may serve as a second lid that defines a side surface of the reaction space 51. The second lid including the exhaust unit 120 may include the exhaust space 55 connected to the reaction space 51. Therefore, the exhaust unit 120 may provide the exhaust space 55. Further, the exhaust unit 120 may provide a space in which the processing unit 110 is received. When the processing unit 110 is received in the space, the processing unit 110 may be in contact with the exhaust unit 120.

The exhaust unit 120 may include a partition wall W between the reaction space 51 and the exhaust space 55. A first surface (e.g., an outer surface) of the partition wall W may define the reaction space 51 and a second surface of the partition wall W (i.e., an inner surface as a surface facing the first surface) may define the exhaust space 55. For example, the reaction space 51 may be defined by the first surface side of the partition wall W, an upper surface of the substrate supporting unit 150, and a lower surface of the processing unit 110, which is the first lid. In other words, a side of the reaction space 51 may be defined by the partition wall W of the exhaust unit 120.

The exhaust unit 120 may provide a portion of a space for the object to be processed. For example, when the substrate processing apparatus performs a deposition function, the reaction space 51 for deposition may be defined by the exhaust unit 120. Further, the exhaust space 55 may be defined inside the exhaust unit 120. The reaction space 51 may be connected to the exhaust port 13 through the exhaust space 55 of the exhaust unit 120. In more detail, gas in the reaction space 51 may be exhausted to the exhaust port 13 through a gap E, the exhaust space 55, and the opening OP.

The flow control unit 130 may be disposed in the exhaust space 55. For example, the flow control unit 130 may extend to have a circumference of a shape corresponding to a shape of the substrate. In this case, the area defined by the circumference which is formed by extending the flow control unit 130 may be greater than the area of the substrate. In an embodiment, the flow control unit 130 may be formed to entirely extend over the exhaust space 55. In another embodiment, the flow control unit 130 may be formed to extend over a portion of the exhaust space 55.

The flow control unit 130 may be introduced to prevent deflection of the exhaust flow, which may occur when the exhaust port 13 is disposed asymmetrically with respect to the reaction space 51. For example, the exhaust efficiency of the exhaust space 55 (in FIG. 2) around the exhaust port 13 may be greater than the exhaust efficiency of the exhaust space 55 (in FIG. 1) apart from the exhaust port 13, and the flow control unit 130 may be introduced to reduce this difference in exhaustion efficiency.

In an embodiment, the flow control unit 130 may include a plurality of through holes arranged to surround the reaction space 51. With this arrangement of through holes, partial control of the exhaust efficiency may be achieved. For example, the flow control unit 130 may include at least one flow control plate including a plurality of through holes. The flow control plate may be implemented in various forms. In an example, the flow control plate may be implemented to have an ‘L’ shape in the cross-section of the exhaust space 55. In another example, the flow control plate may be implemented to have a ‘T’ shape in the cross-section of the exhaust space 55. In another example, the flow control plate may be implemented to have various shapes.

In some embodiments, the flow control unit 130 may generate a first exhaust flow F1 (in FIG. 2) to move away from the exhaust port 13 in the first region of the exhaust space 55 (in FIG. 2) adjacent to the exhaust port 13. That is, the flow control unit 130 may generate the first exhaust flow F1 (in FIG. 2) in a direction opposite to the direction towards the exhaust port 13 from the opening OP of the exhaust unit 120.

In addition, the flow control unit 130 may generate a second exhaust flow F2 (in FIG. 1) directed towards the exhaust port 13 in a second region of the exhaust space 55 (in FIG. 2) apart from the exhaust port 13. That is, the flow control unit 130 may generate the second exhaust flow F2 (in FIG. 1) in a direction towards the exhaust port 13 from the opening OP of the exhaust unit 120.

In this way, the exhaust in the exhaust space 55 (in FIG. 2) adjacent to the exhaust port 13 may have the first exhaust efficiency by the first exhaust flow F1 to move away from the exhaust port 13, and the exhaust in the exhaust space 55 (in FIG. 1) apart from the exhaust port 13 has the second exhaust efficiency higher than the first exhaust efficiency by the second exhaust flow F2 directed towards the exhaust port 13.

In some embodiments, the flow control unit 130 may include a plurality of flow control plates. For example, the flow control unit 130 may include an upper flow control plate 133 and a lower flow control plate 135 disposed below the upper flow control plate 133.

The upper flow control plate 133 may include a plurality of first through holes TH1. The plurality of first through holes TH1 may be arranged along a first circumference having a first diameter. The lower flow control plate 135 may include a plurality of second through holes TH2. The plurality of second through holes TH2 may be arranged along a second circumference having a second diameter larger than the first diameter.

Gas in the reaction space 51 may be exhausted to the exhaust port 13 through the first through hole TH1 and the second through hole TH2. The first through hole TH1 disposed along a first circumference of a smaller diameter of the upper flow control plate 133 and the second through hole TH2 disposed along a second circumference of a greater diameter of the lower flow control plate 135 may generate an exhaust flow from the exhaust space 55 towards the reaction space 51. This exhaust flow may also be defined as an exhaust flow from an outer wall O of the exhaust unit 120 towards the partition wall W of the exhaust unit 120.

In more detail, an exhaust flow from the exhaust space 55 towards the reaction space 51 may be generated between the upper flow control plate 133 and the lower flow control plate 135. That is, gas in the reaction space 51 may pass through the second through hole TH2 disposed along the second circumference of the greater diameter and then may pass through the first through hole TH1 disposed along the first circumference of the smaller diameter. Since the second through hole TH2 is located outside the exhaust space 55 and the second through hole TH2 is located inside the exhaust space 55, an exhaust flow from the outside to the inside may be generated while the gas in the reaction space 51 is exhausted.

This exhaust flow from the outside to the inside may generate different exhaust flows with respect to the exhaust port 13 in the exhaust space 55 (in FIG. 2) adjacent to the exhaust port 13 and the exhaust space 55 (in FIG. 1) apart from the exhaust port 13. That is, since the exhaust port 13 is disposed asymmetrically with respect to the reaction space 51 or the exhaust space 55, a forward exhaust flow towards the exhaust port 13 may be generated in a portion, and an exhaust flow in a reverse direction against the exhaust port 13 may be generated in another portion.

In more detail, for example, the exhaust flow from the outside to the inside may include the first exhaust flow F1 (in FIG. 2) to move away from the exhaust port 13 in the first region (e.g., a space between the upper flow control plate 133 and the lower flow control plate 135) of the exhaust space 55 (in FIG. 2) adjacent to the exhaust port 13. In addition, the exhaust flow from the outside to the inside may include the second exhaust flow F2 (in FIG. 1) directed towards the exhaust port 13 in the second region (e.g., the space between the upper flow control plate 133 and the lower flow control plate 135) of the exhaust space 55 (in FIG. 1) apart from the exhaust port 13.

In an example, the exhaust unit 120 may include a connecting wall C and the outer wall O extending from the partition wall W. The outer wall O of the exhaust unit 120 is disposed in parallel with the partition wall W and may contact the support TLD. The opening OP may be formed on the outer wall O, and the exhaust unit 120 and the exhaust port 13 may be connected to each other through the opening OP. The connecting wall C of the exhaust unit 120 may extend to connect the partition wall W to the outer wall O. The connecting wall C may provide a contact surface with the processing unit 110. The processing unit 110, which is the first lid, and the exhaust unit 120, which is the second lid, may be in contact with each other by the contact surface.

The support TLD may contact the exhaust unit 120 to support the processing unit 110 and the exhaust unit 120. The support TLD may be supported by the partition 100. As described above, the support TLD may serve as a top lid which is supported by the partition 100 to cover an outer chamber while supporting the processing unit 110 as the first lid and the exhaust unit 120 as the second lid.

The support TLD may be between the partition 100 and the exhaust port 13. The support TLD may include a path P connecting the exhaust port 13 to the exhaust line 18 of the partition 100. In an embodiment, a cross-sectional area of the path P and a cross-sectional area of the exhaust line 18 may be substantially the same. For example, when the path P and the exhaust line 18 are formed in a circular shape, a diameter of the path P may be the same as that of the exhaust line 18. In additional embodiments, a sealing member (not shown) may be between the support TLD and the partition 100. The sealing member may extend along a circumference of the path P or the exhaust line 18, thereby preventing leakage of gas moving from the path P to the exhaust line 18.

The support TLD may be between the partition 100 and a lid (e.g., the second lid including the exhaust unit 120). A gas flow control ring FCR may be on the support TLD. Further, the gas flow control ring FCR may be between the support TLD and the substrate supporting unit 150. The gas flow control ring FCR may be slidably on the support TLD. The gas flow control ring FCR may be spaced apart from the substrate supporting unit 150 to form a gap G, and a pressure balance between the reaction space 51 and an inner space of the outer chamber may be controlled by adjusting the gap G.

The partition wall W may provide a gap E connecting the reaction space 51 to the exhaust space 55. For example, the gap E may be formed between the exhaust unit 120 and the gas flow control ring FCR. The gap E may be a channel between the reaction space 51 and the exhaust space 55. Therefore, the reaction space 51 and the exhaust space 55 may communicate with each other through the channel.

The exhaust port 13 may include a channel extending in a first direction towards the exhaust unit 120 and a second direction different from the first direction. In an example embodiment, the exhaust port 13 may have an L-shaped or L-like shaped channel formed therein, so that gas in the exhaust space 55 may flow laterally towards the exhaust port 13 and may be exhausted downward. In another example, the gas in the exhaust space 55 may flow laterally and may be exhausted upward. The gas exhausted through the exhaust port 13 may be transferred to an exhaust pump (not shown) through the exhaust line 18, and the gas may be exhausted to the outside by the exhaust pump (not shown).

In some embodiments, the lower flow control plate 135 may be disposed to contact the partition wall W and the outer wall O of the exhaust unit 120. For example, the lower flow control plate 135 may include a first portion extending between the partition wall W and the outer wall O, the first portion being in contact with the partition wall W and the outer wall O. The lower flow control plate 135 may further include a second portion extending from the first portion and in contact with the support TLD. The second through hole TH2 of the lower flow control plate 135 may be disposed to penetrate the first portion.

In some embodiments, the upper flow control plate 133 may be disposed to contact the partition wall W and the outer wall O of the exhaust unit 120. For example, the upper flow control plate 133 may include a third portion extending between the partition wall W and the outer wall O, the third portion being in contact with the partition wall W and the outer wall O. The upper flow control plate 133 may further include a fourth portion extending from the third portion and in contact with the lower flow control plate 135. The first through hole TH1 of the upper flow control plate 133 may be disposed to penetrate the third portion.

The opening OP may be disposed above the gap E, and the upper flow control plate 133 and the lower flow control plate 135 may be disposed between the opening OP and the gap E. Therefore, the gas in the reaction space 51 may be exhausted to the exhaust port 13 through the gap E, the second through hole TH2 of the lower flow control plate 135, the first through hole TH1 of the upper flow control plate 133, and the opening OP. A path in this exhaust space includes the following path:

(1) a first path extending from the gap E towards the outer wall O;

(2) a second path extending from the first path to penetrate the lower flow control plate 135, the second path extending through the second through hole TH2;

(3) a third path extending from the second path towards the partition wall W, wherein a forward exhaust flow and a reverse exhaust flow with respect to the opening OP may be generated OP by the third path as described above;

(4) a fourth path extending from the third path to penetrate the upper flow control plate 133, the fourth path extending through the first through hole TH1; and

(5) a fifth path extending from the fourth path towards the opening OP.

As such, according to an embodiment of the inventive concept, by arranging at least one flow control plate in an exhaust unit (e.g., exhaust duct) surrounding a reactor and forming through holes on each plate, the deflection of an exhaust flow by an asymmetrically arranged exhaust port may be improved. Furthermore, by varying the size, shape and density of the through holes, it is possible to improve the deflection of an exhaust flow in a reaction space. In particular, the deflection of the exhaust flow may be further improved by providing a unit for forming a reverse exhaust flow in the exhaust unit.

FIGS. 3 to 5 are views of a substrate processing apparatus according to some embodiments of the inventive concept. In more detail, FIG. 3 shows a portion (e.g., exhaust lines 18 and 28, a connection port CP, an external path EC connected to an external pump, etc.) of the substrate processing apparatus excluding a lid (i.e., a processing unit and an exhaust unit) and an exhaust port. FIG. 4 is a view of FIG. 3 viewed from a first direction, and FIG. 5 is a view of FIG. 3 viewed from a second direction. The substrate processing apparatus according to the embodiments may be a variation of the substrate processing apparatus according to the above-described embodiments. Hereinafter, repeated descriptions of the embodiments will not be given herein.

Referring to FIGS. 3 to 5, exhaust lines 18 and 28 are formed in the partition 100. The exhaust lines 18 and 28 are connected to the external path EC through the connection port CP and the external path EC is connected to a main exhaust path 211. Therefore, gas in a reaction space is exhausted to an exhaust pump EP via exhaust ports 13 and 23, the exhaust lines 18 and 28, the external path EC, and the main exhaust path 211. Although not shown in the drawings, each of the exhaust ports 13 and 23 is provided with a flow control unit according to embodiments of the inventive concept.

As shown in FIG. 4, two reactors R1 a and R1 b in a first direction use internal exhaust lines 18 a and 18 b, and the remaining two reactors in a direction opposite to the first direction use other internal exhaust lines 28 a, 28 b (see FIG. 3). The two internal exhaust lines 18 and 28 are connected to the external path EC through connection ports CP and CP′, respectively. The external path EC may be implemented in one configuration or in a plurality of configurations.

As a result, it can be seen that the four reactors use at least one of external paths EC and EC′, the main exhaust path 211, and the exhaust pump EP. An isolation valve 210 may be added to the main exhaust path 211. Therefore, the exhaust pump EP may be protected from the outside atmosphere by the isolation valve 210 during a maintenance period. Further, a pressure control valve (e.g., a throttle valve) may be added to the main exhaust path 211. The external path EC may be fixed so as not to move in close contact with a lower surface of the partition 100 of an outer chamber. In an alternative embodiment, the two internal exhaust lines 18 and 28 may be connected to each other within a bottom wall of the partition 100 of the outer chamber and directly connected to the main exhaust path 211, without the external path EC.

Referring again to FIG. 3, the first external path EC connected to the first connection port CP may extend below the partition 100 towards a first corner portion C1 of the outer chamber. In addition, the second external path EC′ connected to the second connection port CP′ (not shown) may extend below the partition 100 towards a second corner portion C2 of the outer chamber. The exhaust pump EP may be arranged on one surface of the substrate processing apparatus, for example, corresponding to the center between the first corner portion C1 and the second corner portion C2. The first external path EC may extend from the portion extending to the first corner portion C1 to the exhaust pump EP. Also, the second external path EC′ may extend from the portion extending to the second corner portion C2 to the exhaust pump EP.

FIGS. 6 to 8 are views of a substrate processing apparatus according to embodiments of the inventive concept. The substrate processing apparatus according to the embodiments may be a variation of the substrate processing apparatus according to the above-described embodiments. Hereinafter, repeated descriptions of the embodiments will not be given herein.

FIG. 6 shows an upper surface of a multi-reactor chamber 311. A plurality of reactors R are arranged in the chamber 311, and one side of each of the reactors R is connected to an exhaust port 313. FIG. 6 shows that each reactor R is connected to each exhaust port 313, and the exhaust port 313 is disposed asymmetrically with respect to the center of each reactor R.

A plurality of exhaust lines 318 may be formed in a partition of the chamber 311. For example, the chamber 311 may be rectangular in shape, and the plurality of exhaust lines 318 may include a first exhaust line, a second exhaust line, a third exhaust line, and a fourth exhaust line. In some embodiments, the first to fourth exhaust lines may be arranged respectively corresponding to four vertices of the rectangle.

The chamber 311 may include a first reactor, a second reactor, a third reactor, and a fourth reactor. Each reactor may include a substrate supporting unit, a processing unit, an exhaust unit, and an exhaust port.

In more detail, the first reactor may include a first substrate supporting unit (not shown) accommodated in the partition of the chamber 311, a first processing unit 312 on the first substrate supporting unit, a first exhaust unit 314 connected to a first reaction space between the first substrate supporting unit and the first processing unit 312, and a first exhaust port 313 connected to at least a portion of the first exhaust unit 314. In this case, the first exhaust port 313 may be configured to connect the first exhaust unit 314 to a first exhaust line 318 in the partition.

The second reactor may include a second substrate supporting unit (not shown) accommodated in the partition of the chamber 311, a second processing unit 312 on the second substrate supporting unit, a second exhaust unit 314 connected to a second reaction space between the second substrate supporting unit and the second processing unit 312, and a second exhaust port 313 connected to at least a portion of the second exhaust unit 314. In this case, the second exhaust port 313 may be configured to connect the second exhaust unit 314 to the second exhaust line 318 in the partition.

The third reactor may include a third substrate supporting unit (not shown) accommodated in the partition of the chamber 311, a third processing unit 312 on the third substrate supporting unit, a third exhaust unit 314 connected to a third reaction space between the third substrate supporting unit and the third processing unit 312, and a third exhaust port 313 connected to at least a portion of the third exhaust unit 314. In this case, the third exhaust port 313 may be configured to connect the third exhaust unit 314 to the third exhaust line 318 in the partition.

The fourth reactor may include a fourth substrate supporting unit (not shown) accommodated in the partition of the chamber 311, a fourth processing unit 312 on the fourth substrate supporting unit, a fourth exhaust unit 314 connected to a fourth reaction space between the fourth substrate supporting unit and the fourth processing unit 312, and a fourth exhaust port 313 connected to at least a portion of the fourth exhaust unit 314. In this case, the fourth exhaust port 313 may be configured to connect the fourth exhaust unit 314 to the fourth exhaust line 318 in the partition.

As described above with reference to FIGS. 3 to 5, the substrate processing apparatus may further include the first connection port CP (of FIGS. 3 and 5) connecting the first exhaust line and the second exhaust line and the second connection port CP′ (of FIGS. 3 and 5) connecting the third exhaust line to the fourth exhaust line. In addition, the substrate processing apparatus may further include at least one of the external paths EC and EC′ (of FIG. 3) connecting the first connection port to the exhaust pump EP (of FIG. 4) and connecting the second connection port to the exhaust pump. The external paths EC and EC′ may be disposed outside the partition of the chamber 311.

FIG. 7 shows a side perspective view of the reactor R. A reaction space of the reactor R may be defined as a space surrounded by a cover having an exhaust unit 314 such as an exhaust duct, a gas flow control ring 315 under the cover, a processing unit (e.g., a showerhead (not shown)) in an inner space surrounded by the exhaust unit 314, and a substrate supporting unit (e.g., a heater (not shown)) disposed to face the processing unit.

The exhaust unit 314 and the gas flow control ring 315 may be apart from each other to form a gap. A space of, for example, 1 mm may be formed therebetween and gas in the reaction space is exhausted to an exhaust pump (not shown) through an exhaust space 316 inside the exhaust unit 314, the exhaust port 313, and the exhaust line 318 through the gap (i.e., an interspace). The exhaust port 313 may include a channel for exhausting gas downward.

In FIGS. 7 and 8, an exhaust path of gas is indicated by an arrow. As can be seen from the above drawings, according to the inventive concept, a side pumping structure that exhausts gas through the inside of a wall of a chamber is adopted.

Gas supplied from the top of a reactor to a reaction space through a processing unit 312 may be radially dispersed. The radially dispersed gas may move towards the exhaust space 316 of the exhaust unit 314. The gas radially dispersed and directed towards the exhaust space 316 may be exhausted into the exhaust space 316 through a gap between the exhaust unit 314 and the gas flow control ring 315. The gas is exhausted to the outside through the exhaust port 313 connected to one surface of the exhaust unit 314.

As such, gas remaining in the reaction space has a side pumping structure that is exhausted through a side surface of the reactor. In more detail, the exhaust line 318 formed in a partition is formed in a side wall and a lower wall of the chamber 311, and the exhaust line 318 and the exhaust unit 314 communicate with each other through the exhaust port 313.

Referring to the substrate processing apparatus of the lateral exhaust structure of FIGS. 6 to 8, gas is supplied to each reactor through a central portion (i.e., the processing unit 312) above each reactor, and gas is exhausted through the exhaust port 313 installed at the side of the reactor. As described above, the exhaust system may include an exhaust path formed in an inner wall of a chamber and gas in the reaction space may be exhausted through an exhaust port installed at the side of the reactor and the exhaust path formed in the inner wall of the chamber. One end of the exhaust path formed in the inner wall of the chamber may be connected to the exhaust port and the other end may be connected to an exhaust pump outside the chamber.

Referring to FIGS. 6 to 8, gas supplied to the reaction space from the top of the reactor through the processing unit 312, such as a showerhead, is exhausted to an external exhaust pump (not shown) through the exhaust unit, the exhaust path 316 which is an inner space of the exhaust unit 314, the exhaust port 313 connected to one surface of exhaust unit 314, and the exhaust path 318 in the inner wall of the chamber, through a gap between the exhaust unit 314 and the gas flow control ring 315.

A substrate processing apparatus including such a plurality of reactors has a side pumping structure in which the gas of the reactor is exhausted through the side of the reactor. In more detail, a main exhaust path is formed in the side wall and the lower wall of the chamber 311, and the main exhaust path and the exhaust unit 314 communicate with each other through the exhaust port 313.

However, as shown in FIG. 8, in the case where the exhaust port 313 is arranged asymmetrically, uniformity of gas exhaust in the reaction space is reduced. In other words, an exhaust flow E1 in the direction towards the exhaust port 313 and an exhaust flow E2 in the direction opposite to the exhaust port 313 are different from each other (i.e., E1≠E2). For example, a flow rate of the exhaust flow E1 may be greater than a flow rate of the exhaust flow E2.

When the exhaust port 313 is asymmetrically disposed as described above, since the exhaust flow varies from location to location, the symmetry of film profile and thickness of the final deposited film is degraded around a substrate. This degradation of symmetry causes increased difficulty of subsequent processes and device defects. Accordingly, the disclosure discloses an apparatus for implementing uniform exhaust of gas in a reactor of a semiconductor substrate processing apparatus having a side exhaust system. In more detail, the disclosure discloses a device for controlling a gas flow in an exhaust path.

FIG. 9 is a view of a substrate processing apparatus according to some embodiments of the inventive concept. The substrate processing apparatus according to the embodiments may be a variation of the substrate processing apparatus according to the above-described embodiments. Hereinafter, repeated descriptions of the embodiments will not be given herein.

Referring to FIG. 9, flow control plates 11 and 12 are disposed in the exhaust path 6 in an exhaust duct 4 of the substrate processing apparatus. In more detail, the upper flow control plate 12 and the lower flow control plate 11 are configured to be stacked. Exhaust holes are arranged in each of the flow control plates 11 and 12, and an exhaust flow in the exhaust space 6 in the exhaust duct 4 may be controlled according to configuration and arrangement of the exhaust holes.

When gas is supplied through a showerhead 2 towards a substrate (not shown) on a heater block 10, the gas moves to the exhaust space 6 through a gap between the exhaust duct 4 and a flow control ring 5. During this movement, the gas passes through the upper flow control plate 12 and the lower flow control plate 11.

While the gas passes through the upper flow control plate 12 and the lower flow control plate 11, the exhaust efficiency of the gas may be changed. For example, in an exhaust space apart from an exhaust port, a forward exhaust flow that is directed towards the exhaust port may be generated, thereby increasing exhaust efficiency. Meanwhile, in the exhaust space adjacent to the exhaust port, an exhaust flow in a reverse direction to move away from the exhaust port may be generated, thereby reducing the exhaust efficiency.

FIGS. 10 and 11 are views of comparative examples of an exhaust flow in a related substrate processing apparatus and an exhaust flow in a substrate processing apparatus according to the disclosure.

FIG. 10 shows an exhaust flow in a reactor without a flow control plate. Gas in the reactor is exhausted through an exhaust path formed inside a chamber wall via a gap between an exhaust duct and a gas flow control ring, an exhaust space in the exhaust duct, and an exhaust port.

FIG. 11 shows an embodiment of an exhaust flow according to the disclosure and gas is exhausted through a lower flow control plate, an upper flow control plate, and an exhaust port in an exhaust duct and an exhaust path formed inside a chamber wall.

In contrast to the exhaust flow of FIG. 10, according to the exhaust flow in the embodiment of FIG. 11, gas in a reactor does not exhaust directly towards the exhaust port. That is, the exhaust flow of FIG. 11 has an exhaust flow in a reverse direction opposite to the exhaust port in a space between the lower flow control plate and the upper flow control plate.

The exhaust flow in the reverse direction may be implemented by different arrangements of exhaust holes disposed in the lower flow control plate and the upper flow control plate. In other words, by configuring the exhaust hole on the lower flow control plate to be close to the exhaust port and the exhaust hole on the upper flow control plate to be far from the exhaust port, the exhaust flow in the reverse direction may be implemented. By this arrangement, a technical effect of controlling the flow of exhaust gas in the exhaust duct may be achieved.

FIG. 12 is a view of an embodiment of an upper flow control plate and a lower flow control plate. Referring to FIG. 12, an exhaust gas flow in an exhaust duct may be controlled by varying the size of exhaust holes in the upper and lower flow control plates, a gap between the holes, and a density of the holes (the number of holes per unit length). For example, the diameters of a plurality of first through holes formed in the upper flow control plate may be greater than the diameters of a plurality of second through holes formed in the lower flow control plate.

FIG. 13 is a view of various embodiments of the arrangement of exhaust holes on upper and lower flow control plates in a direction facing an exhaust port in a reaction space. Referring to FIG. 13 (a), as described above, the diameters of the plurality of first through holes formed in the upper flow control plate may be greater than the diameters of the plurality of second through holes formed in the lower flow control plate. Meanwhile, densities of the first through holes and the second through holes may be the same.

Referring to FIG. 13 (b), in another embodiment, the density of the first through hole of the upper flow control plate may be less than the density of the second through hole of the lower flow control plate. Meanwhile, the diameter of the first through hole may be greater than the diameter of the second through hole. In another embodiment, the diameter of the first through hole may be equal to or less than the diameter of the second through hole.

Referring to FIG. 13 (c), in another embodiment, the first through hole of the upper flow control plate may be disposed to alternate with the second through hole of the lower flow control plate. Meanwhile, the diameter of the first through hole may be the same as the diameter of the second through hole. In another embodiment, the diameter of the first through hole may be different from the diameter of the second through hole.

FIG. 13 shows an embodiment in which the size, shape, and arrangement of the second through holes are changed with respect to the lower flow control plate. However, the size, shape, and arrangement of the exhaust holes on the upper flow control plate may be changed, or the sizes, shapes, and arrangements of the exhaust holes on the two plates may be changed at the same time.

In some embodiments, a through hole having the arrangement of FIG. 13 (a) (i.e., the diameter of the first through hole is greater than the diameter of the second through hole and the densities of both are the same) may be implemented at a position close to an exhaust port, and a through hole having the arrangement of FIG. 13 (b) (i.e., the diameter of the first through hole is greater than the diameter of the second through hole and the density of the second through hole is greater than the density of the first through hole) may be implemented at a position far from the exhaust port. By implementing such exhaust holes, a technical effect that can improve the deflection of an exhaust flow in the reaction space may be achieved.

FIG. 14 is a view of a substrate processing apparatus according to some embodiments of the inventive concept. The substrate processing apparatus according to the embodiments may be a variation of the substrate processing apparatus according to the above-described embodiments. Hereinafter, repeated descriptions of the embodiments will not be given herein.

Referring to FIG. 14, an upper flow control plate may include a first region A adjacent to an exhaust port and a second region B apart from the exhaust port. In this case, among a plurality of first through holes of the upper flow control plate, through holes of the first region A may be arranged along a third circumference having a third diameter, and through holes of the second region B may be arranged along a fourth circumference having a fourth diameter greater than the third diameter.

A plurality of second through holes of the lower flow control plate may be arranged along the fourth circumference having the fourth diameter. In this case, in the first region A close to the exhaust port, a reverse exhaust flow may be formed in an exhaust duct. That is, by moving gas from the second through holes arranged along the fourth diameter of the lower flow control plate to the first through holes arranged along the third diameter less than the fourth diameter of the upper flow control plate, a flow in the opposite direction to a suction force (suction direction) of the exhaust port may be generated. By this reverse exhaust flow, an exhaust path of gas in the first region A close to the exhaust port becomes longer and consequently the exhaust efficiency may be reduced.

Meanwhile, this reverse exhaust flow may not be formed in the second region B far from the exhaust port. That is, by moving gas from the second through holes arranged along the fourth diameter of the lower flow control plate to the first through holes arranged along the fourth diameter of the upper flow control plate, gas may move from the lower flow control plate to the upper flow control plate without the reverse exhaust flow described above. Therefore, an exhaust path of gas in the second region B close to the exhaust port becomes relatively short, and consequently the exhaust efficiency may be increased.

In the above drawings, two flow control plates are arranged in an exhaust duct, but two or more flow control plates may be arranged, or one flow control plate may be arranged. The deflection of an exhaust flow in a reaction space may be controlled and improved by varying the number, size, and density of exhaust holes on the flow control plate according to the relative distance and position from each point on the flow control plate to an exhaust port.

In some embodiments, the flow control plate may include a first extension extending in a first direction and a second extension extending in a second direction different from the first direction. When the second extension extends from one end of the first extension, an “L” shaped flow control plate may be implemented. When the second extension extends from a portion between both ends of the first extension, a “T” shaped flow control plate may be implemented. FIG. 15 is a view of a flow control plate configured to have a “T” shape in cross-section.

In the case of the T-shaped flow control plate, a through hole may be formed in each of a first extension and a second extension. The number and/or size of the through holes may be adjusted according to relative positions of the through holes. As also shown in FIG. 11, a plurality of T-shaped flow control plates may also be stacked in a longitudinal direction. In addition, the plurality of T-shaped flow control plates may be arranged in a horizontal direction.

It should be understood that embodiments described herein should be considered in a descriptive sense only and not for purposes of limitation. Descriptions of features or aspects within each embodiment should typically be considered as available for other similar features or aspects in other embodiments. While one or more embodiments have been described with reference to the figures, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the disclosure as defined by the following claims. 

What is claimed is:
 1. A substrate processing apparatus comprising: an exhaust unit providing an exhaust space surrounding a reaction space; an exhaust port connected to the exhaust unit; and a flow control unit disposed in the exhaust space, wherein the exhaust port is disposed asymmetrically with respect to the reaction space, and the flow control unit comprises: an upper flow control plate comprising a plurality of first through holes; and a lower flow control plate disposed below the upper flow control plate and comprising a plurality of second through holes, wherein the exhaust unit further comprises: a partition wall defining a side portion of the reaction space; an outer wall parallel to the partition wall; and a connecting wall extending to connect the partition wall to the outer wall, wherein the substrate processing apparatus further comprises a support configured to support the exhaust unit, and wherein the reaction space and the exhaust space communicate with each other through a gap between the partition wall and the support.
 2. The substrate processing apparatus of claim 1, wherein the plurality of first through holes are arranged along a first circumference having a first diameter, and the plurality of second through holes are arranged along a second circumference having a second diameter greater than the first diameter.
 3. The substrate processing apparatus of claim 2, wherein an exhaust flow from the exhaust space towards the reaction space is generated between the upper flow control plate and the lower flow control plate.
 4. The substrate processing apparatus of claim 3, wherein the exhaust flow comprises: a first exhaust flow to move away from the exhaust port in a first region of the exhaust space adjacent to the exhaust port; and a second exhaust flow directed towards the exhaust port in a second region of the exhaust space apart from the exhaust port.
 5. The substrate processing apparatus of claim 1, wherein diameters of the plurality of first through holes are different from diameters of the plurality of second through holes.
 6. The substrate processing apparatus of claim 1, wherein densities of the plurality of first through holes are different from densities of the plurality of second through holes.
 7. The substrate processing apparatus of claim 1, wherein the plurality of first through holes are disposed to alternate with the plurality of second through holes.
 8. The substrate processing apparatus of claim 1, wherein the upper flow control plate comprises a first region adjacent to the exhaust port and a second region apart from the exhaust port, through holes of the first region among the plurality of first through holes are arranged along a third circumference having a third diameter, and through holes of the second region among the plurality of first through holes are arranged along a fourth circumference having a fourth diameter greater than the third diameter.
 9. The substrate processing apparatus of claim 1, wherein at least one of the upper flow control plate and the lower flow control plate is arranged to contact the partition wall and the outer wall.
 10. The substrate processing apparatus of claim 1, wherein the lower flow control plate comprises: a first portion extending between the partition wall and the outer wall; and a second portion extending from the first portion and contacting the support, wherein the plurality of second through holes are arranged to penetrate the first portion.
 11. The substrate processing apparatus of claim 1, wherein the outer wall comprises an opening connecting the exhaust unit to the exhaust port, and the opening is above the gap.
 12. The substrate processing apparatus of claim 11, wherein the upper flow control plate and the lower flow control plate are disposed between the opening and the gap.
 13. The substrate processing apparatus of claim 12, wherein gas in the reaction space is exhausted to the exhaust port along a path in the exhaust space, and the path comprises: a first path extending from the gap towards the outer wall; a second path extending from the first path to penetrate the lower flow control plate; a third path extending from the second path towards the partition wall; and a fourth path extending from the third path to penetrate the upper flow control plate.
 14. The substrate processing apparatus of claim 1, wherein the flow control unit is configured to generate exhaust of first exhaust efficiency in an exhaust space adjacent to the exhaust port, and to generate exhaust of second exhaust efficiency higher than the first exhaust efficiency in an exhaust space apart from the exhaust port.
 15. A substrate processing apparatus comprising: an exhaust unit providing an exhaust space surrounding a reaction space; a support configured to support the exhaust unit; an exhaust port connected to the exhaust unit; and a flow control unit disposed in the exhaust space, wherein the exhaust port is disposed asymmetrically with respect to the reaction space, and the flow control unit is configured to generate exhaust of first exhaust efficiency in an exhaust space adjacent to the exhaust port, and to generate exhaust of second exhaust efficiency higher than the first exhaust efficiency in an exhaust space apart from the exhaust port, wherein the exhaust unit further comprises a partition wall defining a side portion of the reaction space, and wherein the reaction space and the exhaust space communicate with each other through a gap between the partition wall and the support.
 16. The substrate processing apparatus of claim 15, wherein the flow control unit comprises a flow control plate comprising a plurality of through holes arranged to surround the reaction space.
 17. A substrate processing apparatus comprising: an exhaust unit providing an exhaust space surrounding a reaction space; an exhaust port connected to the exhaust unit; and a flow control unit disposed in the exhaust space, wherein the exhaust port is disposed asymmetrically with respect to the reaction space, and the flow control unit is configured to: generate a first exhaust flow to move away from the exhaust port in a first region of the exhaust space adjacent to the exhaust port; and generate a second exhaust flow directed towards the exhaust port in a second region of the exhaust space apart from the exhaust port, wherein the exhaust unit further comprises a partition wall defining a side portion of the reaction space, and wherein the reaction space and the exhaust space communicate with each other through a gap below the partition wall.
 18. The substrate processing apparatus of claim 17, wherein exhaust in the exhaust space adjacent to the exhaust port has first exhaust efficiency by the first exhaust to move away from the exhaust port, and exhaust in the exhaust space apart from the exhaust port has second exhaust efficiency higher than the first exhaust efficiency by the second exhaust flow directed towards the exhaust port. 